Yokogawa OX400-3-P-T-E-R/A OX400 Zirconia Oxygen Analyzer

description:Yokogawa OX400-3-P-T-E-R/A OX400 Zirconia Oxygen Analyzer...

Yokogawa OX400-3-P-T-E-R/A OX400 Zirconia Oxygen Analyzer 
Oxygen Analyzer OX400


General  of Yokogawa OX400-3-P-T-E-R/A OX400 Zirconia Oxygen Analyzer

This is the latest oxygen analyzer from Yokogawa, and its development was based on the company's long experience and strong track record with this technology.

The OX400 is a highly accurate and reliable low-concentration zirconia oxygen analyzer that is capable of measuring a wide range of concentrations, from 0-10ppm up to 0-100 vol% O2. This is the latest oxygenanalyzer from Yokogawa, and its development was based on the company’s long experience and strong track record with this technology.

A proprietary new thin-film deposition technology was used in the zirconia sensor that creates a molecular bond between the zirconia element and the platinum layer. This prevents separation, enables a reduction in sensor size and ensures a high-speed response and long life.

The OX400 can be used to control and monitor various semiconductor applications, and to control environment,air leakage into inert gas,and other processes.

Features of Yokogawa OX400-3-P-T-E-R/A OX400 Zirconia Oxygen Analyzer

Long life and high-speed response

• Thanks to the use of Yokogawa’s proprietary new thin-film deposition technology, the sensor has three times the lifespan of those used in our earlier products.

• A cylindrical sensor design facilitates the replacement of measurement gases, thereby helping to assure a high-speed response.

High performance and high reliability

• Superior repeatability and linearity even at low oxygen concentrations

• Either pump or aspirator sampling can be selected,depending on the application.

• CE, CSA, etc. certification.

Built-in functions and a variety of self-diagnosis functions

• Comes with multi selector, auto range, partial range,and pump on/off functions

• A variety of self-diagnosis functions are provided that detect malfunctions such as heater temperature error,temperature sensor burnout, and sensor resistance value error.

Superior maintainability of Yokogawa OX400-3-P-T-E-R/A OX400 Zirconia Oxygen Analyzer

• The sensor can be replaced on-site.

• Compact and lightweight for easy installation.

Applications of Yokogawa OX400-3-P-T-E-R/A OX400 Zirconia Oxygen Analyzer 

• Oxygen concentration control in semiconductor-related diffusion and drying furnaces and in LCD manufacturing processes

• Oxygen concentration control in solder pot flow and re-flow furnaces, and glove boxes used in electronics manufacturing, and in gas production processes

• Oxygen concentration measurements to prevent dust explosions during powder transfer.

Standard Specifications of Yokogawa OX400-3-P-T-E-R/A OX400 Zirconia Oxygen Analyzer 

Measurement object

Oxygen concentrations in inert gases containing no flammable gas, silica, corrosive gas, or liquid (including water vapor).

Measurement system

Zirconia system

Sampling method

Pump, aspirator, or no suction device.

Pump and aspirator suction flow rate : Approx. 1.0 l/min.

Aspirator suction conditions : Air or N2 , supply pressure 65 to 100 kPaG, total discharge flow 10 l/min max. (when gas inlet and outlet are at ambient atmospheric pressure).

Sample gas conditions

Flow rate : 200 ± 25 ml/min (only applies to sensor).

Temperature : 0-50°C (non-condensing).

Humidity : Non-condensing.

Pressure : 0-300 PaG

Measurement range

0-10 ppm O2 to 0-100 vol% O2 .


0.01 ppm O2 .


4 digit LED.

Main display

O2 concentration (auto switching).

Sub display

Parameter or alarm/error number


%, ppm.

Output range



0-10 ppm, 0-100 ppm, 0-1000 ppm, 0-1%, 0-10%, 0-100% (default)

Other: 0-¨0 ppm, 0-¨00 ppm, 0-¨000 ppm, 0-¨%, 0-¨0%, ¨ is an integer from 2 to 9.


Set to 0-10 ppm, 0-100 ppm, 0-1000 ppm, 0-1%, 0-10%, or 0-100%.


Lower value or upper value of range can be set.


Span (upper value-lower value) is 20% FS or more of above fixed range.


200-400 ppm when fixed range is 0-1000 ppm , 20-40 ppm when fixed range is 0-100 ppm.

Analog output

2 outputs,


4 to 20 mA DC (maximum load resistance: 550Ω )


Select from 0-1, 0-5, 0-10 V DC (load resistance: 10 kΩ or greater)

Contact output

3 outputs

Error, O2 concentration alarm contact, range marker contact

Multi selector (optional)

Contact output for switching of measurement flow path, contact output for measurement flow path data. Note: For detailed information, see the external dimensions.



Model and Codes of Yokogawa OX400-3-P-T-E-R/A OX400 Zirconia Oxygen Analyzer

OX400 Analyzers.jpg


Ordering Model of Yokogawa OX400-3-P-T-E-R/A OX400 Zirconia Oxygen Analyzer 






We are specialized in intelligent instruments, including : control system, transmitters, flow meters,sensors, recorders, analyzers, control valves, controllers, PLC's, etc.
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